&12539Applicable wafer size 4“, 5”, 6“, 8”
&12539Applicable frame size for 6”, for 8”
&12539Applicable wafer size 4“, 5”, 6“
&12539Applicable frame size for 5”, for 6”
&12539Illuminance:
&12539UM810: 45mW/cm2 or more Wafer area
&12539UM110: 55mW/cm2 or more Wafer area
&12539UV lamp High pressure mercury lamp Ozone less type
&12539Dominant wave length 365nm
&12539Effective radiation length 250mm
&12539Dimension W630xD670xH990mm
&12539Weight approx. 120kg
&12539Semi automatic type UV irradiator
&12539Wafer mount frame loading and unloading are done manually
&12539Irradiation time range: 0 – 999sec.
&12539N2 pre-blow function
&12539UV illuminometer Option
&12539Irradiation area expand to frame area Option
&12539Support glass for irradiation to BG tape
